| * S - Source only, M - Measurement only, S/M - Source and Measurement |
| DC VOLTAGE | >100 uV to 30 kV | >+/- 0.0002 % | >S/M |
| >Specific values | >1 mV | >+/- 0.02 % | >S/M |
| >10 V | >+/- 0.0002 % | >S/M |
| >100 kV | >+/- .1 % | >S/M |
| | | |
| AC VOLTAGE | 100 mV to 1 kV @ DC to 1MHz ** | >+/- 0.002 % | >S/M |
| >Specific values | >1 mV / 1 kHz | >+/- 0.1 % | >S/M |
| >1 V / 1 kHz | >+/- 0.002 % | >S/M |
| >5 kV / 60 Hz | >+/- 0.1 % | >S/M |
| >30 kV / 60 Hz | >+/- 2 % | >M |
| ** Not all voltage/frequency combinations available |
| DC CURRENT | >1 pA to 100 A | >+/- 0.001 % | >S/M |
| >Specific values | >1 pA | >+/- 0.5 % | >S/M |
| >1 mA | >+/- 0.001 % | >S/M |
| 100 A single turn | >+/- 0.1 % | >S/M |
| | | |
| AC CURRENT | 10 uV to 100 A @ DC to 10 kHz ** | >+/- 0.02 % | >S/M |
| >Specific values | >10 uA / 1kHz | >+/- 0.04 % | >S/M |
| >1 mA / 1 kHz | >+/- 0.02 % | >S/M |
| >100 A / 60 Hzsingle turn | >+/- 0.1 % | >S/M |
| ** Not all voltage/frequency combinations available |
| RESISTANCE | >1 mOhm to 8 TOhm | >+/- 0.0002 % | >S/M |
| >Specific values | >1 mOhm | >+/- 0.05 % | >S/M |
| >10 kOhm | >+/- 0.0002 % | >S/M |
| >8 TOhm | >+/- 0.5 % | >S/M |
| | | |
| CAPACITANCE | >1 pF to 1 F @ 20 Hz to 100 kHz | >+/- 0.0002 % | >S/M |
| >Specific values | >1 pF / 1 kHz | >+/- 0.001 % | >S/M |
| >100/10 pF | >+/- 0.0002 % | >S/M |
| >10 mF / 100 Hz | >+/- 0.005 % | >S/M |
| 1 F / 100 Hz *** | >+/- 0.25 % | >S/M |
| *** 4 Terminal Ratio Type | | | |
| INDUCTANCE | >100 uH to 10 H | >+/- 0.02 % | >S/M |
| | | |
| FREQUENCY | >DC to 26 GHz | >+/- 5E-11 | >S/M |
| | | |
| RF VOLTAGE 50 Ohm | >0.5 to 3 V @ up to 100 MHz | >+/- 0.02 % | >S/M |
| >Specific values | >1 V / 1 MHz | >+/- 0.02 % | >S/M |
| >1 V / 100 MHz | >+/- 0.7 % | >S/M |
| | | |
| RF POWER | >1 mW / 50 MHz | >+/- 0.7 % | >S/M |
| >10 uW to 100 mW / 100 KHz to 26 GHz | >+/- 0.1 % | >S/M |
| >80 W / 20 MHz to 1 GHz | >+/- 3 % | >S/M |
| | | |
| RF ATTENUATION | >0 to 120 dB @ 2.5 to 1300 MHz | >+/- 0.05 dB | >S/M |
| | | |
| TEMPERATURE | >0 to 600 C | >+/- 0.01 C | >S/M |
| | | |
| SOUND (spl) | >74 to 124 dB | >+/- 0.2 dB | >S/M |
| | | |
| OPTICAL POWER | >-70 dBm to 20 dBm @ 1300 / 1500 nm | >+/- 5 % | >M |
| >-60 dBm to 0 dBm @ 1300 / 1500 nm | >+/- 5 % | >S |
